Resist recycling apparatus and method for recycling the same

ABSTRACT

A resist recycling apparatus includes a viscosity control tank supplied with wasted resist liquid; a solvent tank that supplies a solvent to the viscosity control tank; a viscometer that measures viscosity of the resist according to the viscosity measured by the viscometer and the temperature of the resist, and that determines an amount of solvent to supply to the viscosity control tank according to the difference between the calculated resin density and a predetermined resin density; and a filter that removes dust from the resist.

CROSS REFERENCE TO RELATED APPLICATIONS

This is a divisional application of application Ser. No. 09/616,379,filed Jul. 13, 2000 now U.S. Pat. No. 6,503,568 which is herebyincorporated by reference in its entirety for all purposes.

BACKGROUND OF THE INVENTION

1. Field of the Invention

This invention relates to a resist recycling apparatus and a method forrecycling the same, and more particularly, this invention relates to aprocess for recycling resist wastes generated by a process for coating aresist on a substrate.

This application is a counterpart of Japanese application Serial Number278589/1999, filed Sep. 30, 1999, the subject matter of which isincorporated herein by reference.

2. Description of the Related Art

A photolithography technique is generally used in the manufacturing of asemiconductor device.

Spin coating is generally used to form resist thin films on asemiconductor substrate. In a typical spin coating, liquid resist isdropped on to a silicon wafer by a nozzle. Spinning of the wafer spreadsthe resist over the wafer. After spinning, only a thin film of theresist is left on the surface of the wafer.

In excess of 95% of the resist is wasted in spin coating. Therefore, alot of resist recycling techniques have been proposed, such as Japaneselaid open number HEI 8-203804 and so on.

These prior arts cannot control the viscosity of the resist sufficientlyto reuse recycled resist in the manufacturing of a semiconductor device.

SUMMARY OF THE INVENTION

An object of the present invention is to provide a resist recyclingapparatus and a method for recycling a resist.

According to one aspect of the present invention, for achieving theabove object, there is provided a resist recycling apparatus, comprisinga viscosity control tank being supplied with wasted resist liquid, asolvent tank supplying a solvent to the viscosity control tank, aviscometer measuring s viscosity of the resist in the viscosity controltank, a control portion calculating the resin density of the resistaccording to the viscosity measured by the viscometer and thetemperature of the resist, determining an amount of solvent to supply tothe viscosity control tank according to the difference between thecalculated resin density and a predetermined resin density, and a filterremoving dust from the resist.

According to another aspect of the present invention, for achieving theabove object, there is provided a method for recycling a resistcomprising supplying waste resist to a viscosity control tank, measuringthe viscosity of the resist in the viscosity control tank, calculatingthe resin density according to the measured viscosity and thetemperature of the resist in the viscosity control tank, determining theamount of solvent to add to the resist according to the differencebetween the calculated resin density and the predetermined resindensity, supplying a solvent to the viscosity control tank, and removingdust from the resist.

BRIEF DESCRIPTION OF THE DRAWINGS

While the specification concludes with claims particularly pointing outand distinctly claiming the subject matter that is regarded as theinvention, the invention, along with the objects, features, andadvantages thereof, will be better understood from the followingdescription taken in connection with the accompanying drawings, inwhich:

FIG. 1 is a schematic diagram showing a resist recycling apparatusaccording to a first preferred embodiment of this invention.

FIGS. 2A and 2B show a cup structure of a spin coater in this invention.

FIG. 3 shows the relationship between the resin density and theViscosity Current Value.

FIG. 4 shows the relationship between the viscosity and the ViscosityCurrent Value.

FIG. 5 shows relationship s between the resin density and the ViscosityCurrent Value when the temperatures of the resist is changed.

FIG. 6 shows relationships between the coefficients A, B and thetemperature of the resist.

FIG. 7 shows a resist recycling flow in this invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

FIG. 1 is a schematic diagram showing a resist recycling apparatusaccording to a first preferred embodiment of this invention.

This resist recycling apparatus has a viscosity control tank 101, asolvent tank 102, a waste liquid tank 103, a resist supply port 104 forsupplying used resist, a gas supply port 105 for supplying gaseousnitrogen, a flow control valve 106 for controlling a flow rate of thesolvent from the solvent tank to the viscosity control tank 101, anagitator 107 for agitating the viscosity control tank 101, a gaseousnitrogen supply pipe 108, a gas exhaust pipe 109, a pump 110, aplurality of valves 111˜115, a filter 116 for filtering a resist, afilter 117 for filtering gaseous nitrogen, a measure 118 for measuringthe weight of the viscosity control tank 101, an ultrasonic viscometer119 for measuring the viscosity and the temperature of the resist in theviscosity control tank 101, and a control portion 120 for controllingthe flow control valve or etc.

The viscosity control tank 101 is a tank for controlling the viscosityof resist. The used resist, which is collected in a resist coatingapparatus, is supplied into the viscosity control tank 101 through thevalve 111 from the resist supply port 104. Solvent thinner is suppliedinto the viscosity control tank 101 through the control valve 106 fromthe solvent tank 102.

The gaseous nitrogen is supplied into the viscosity control tank 101through the valve 112 and the filter 117. This gaseous nitrogen preventsthe collected resist from coming into contact with the air. This gaseousnitrogen is also used to move the resist by the pressure of the gaseousnitrogen after the viscosity control.

The agitator 107 to make the temperature and the viscosity of the resistuniform agitates the resist in the viscosity control tank 101.

The viscosity and the temperature of the resist are measured by theultrasonic viscometer 119. The data measured by the viscometer is sentto the control portion 120.

The ultrasonic viscometer 119 in this embodiment has a vibrating polethat vibrates in a constant cycle and constant amplitude. The value ofan electric current to vibrate the vibrating pole shows the viscosity.The viscosity is calculated based on this value of an electric current.The value of an electric current is sent to the control portion 120 as ameasured data. This value of an electric current is called ViscosityCurrent Value hereinafter.

The solvent tank 102 holds thinner which is the solvent of the resist inthis embodiment.

The wasted liquid tank 103 holds waste resist. The resist held in thistank 103 is delivered to the viscosity tank 101 by the pump 103 a.

There are two ways to supply waste resist in to the viscosity controltank 101. One way is to supply through the resist supply port 104, andanother way is to supply from the waste liquid tank 103.

After the control of the viscosity of the resist, the resist is suppliedas recycled resist through the filter 116.

In this embodiment, waste resist is collected separately from the edgerinse liquid or the back rinse liquid.

FIGS. 2A and 2B show a cup structure for collecting waste resist. A spinchuck 202 adsorbs a semiconductor wafer 201. A cup inside 203 has twolayers and it moves up and down. During a resist coating, a cup is setdownward as shown in FIG. 2A.

A resist liquid is deposited on the wafer. During the resist liquiddeposition, the wafer is spinning, and the resist liquid is scatteredout about the same height of the semiconductor wafer surface.

The scattered resist gets into the upper layer of the inside of the cupand is collected through the upper layer. The collected resist is heldin the waste liquid tank 103 or supplied directly to the resist supplyport 104.

During a back rinse or an edge rinse, the cup is set upward as shown inFIG. 2B. When back rinse or edge rinse is done in this state, the rinseliquid is scattered out.

The scattered rinse liquid gets into the lower layer of the inside ofthe cup and is collected through the lower layer. The collected rinse isrecycled after processes of filtering etc.

The method for resist recycling in this invention is described below.

Most important thing in the resist coating process is the uniformity ofthe resist thickness. The thickness of the resist is mainly determinedby the viscosity of the resist. A resin density (ratio of resin includedin resist liquid) determines the viscosity of resist liquid.

A method for measuring viscosity of resist and resin density isdescribed below.

FIG. 3 shows the relationship between the resin density and theViscosity Current Value, in this embodiment, the value of an electriccurrent, which shows the viscosity of resist as described above, isused.

The detailed experiments of the inventor of this invention confirm therelationship of the Viscosity Current Value X and the resin density Y.This relationship is expressed by using a logarithmic function (naturallogarithm) as shown below.

Y=ALnX+B (A,B: coefficients)   (1)

This relationship makes it possible to calculate the ratio of resinincluded in resist liquid.

The viscosity itself pointed out by the ultrasonic viscometer is notused in the above expression. The Viscosity Current Value is used in theabove expression.

FIG. 4 shows the relationship between the viscosity and the ViscosityCurrent Value.

The relationship of the Viscosity Current Value X and the viscosity isexpressed by using a tertiary function

If the Expression (1) is expressed using the viscosity, the Expression(1) becomes very complex, so the calculation of the resin densitybecomes very difficult. However, by using the Viscosity Current Value,it becomes very simple, and the calculation can be performed moreprecisely.

FIG. 5 shows relationships between the resin density and the ViscosityCurrent Valve when the temperatures of the resist are changed.

The temperature of the resist determines the coefficients A, B of theexpression 1.

FIG. 6 shows relationships between the coefficients A, B and thetemperature of the resist.

More detailed experiments revealed that relationships between thecoefficients A, B and the temperature are linear.

The coefficients A, B are expressed as below.

A=CT+D (C,D: coefficients, T: temperature)   (2)

B=ET+F (E,F: coefficients, T: temperature)   (3)

These expressions are applied to the expression (1). When the ViscosityCurrent Value X is measured at the temperature T, the resin density Y isexpressed as below.

Y=(CT+D)LnX+ET+F   (4)

In this embodiment, the resist used is FF134A made by Sumitomo ChemicalIndustry. The expression (4) of this resist is described below.

Y=(0.0164·T+0.5764)LnX+(−0.0987·T−3.3168)   (5)

The expression (4) is applied to various resists by changingcoefficients C,D,E,F.

FIG. 7 shows a resist recycling flow in this invention. The resistrecycle flow of the invention will be described in conjunction with FIG.1 and FIG. 7.

Step 1

Predetermined resin density Y1 is inputted to the control portion 120.The used resist, which is collected in a resist coating apparatus, issupplied into the viscosity control tank 101 from the resist supply port104. The used resist may be supplied from the waste resist tank 103 by apump.

Step 2

The agitator 107 agitates the resist in the viscosity control tank 101.After the temperature and the viscosity of the resist are made uniform,the ultrasonic viscometer 119 measures the viscosity and the temperatureof the resist

Step 3

The measured data are sent to a control portion 120, and the controlportion 120 calculates the resin density Y2 of the used resist by usingthe expression (5).

Step 4

The control portion 120 calculates the amount of thinner that should beadded to the used resist. The amount of thinner is calculated accordingto the difference between a predetermined resin density Y1 and themeasured resin density Y2.

For example, if predetermined resin density is 25%, then when measuredresin density of 1 kg of the used resist is 30%, 200 g of thinner shouldbe added. The relationship described above is expressed as below.

I=L(Y1/Y2−1)   (6)

In the expression (6), predetermined resin density is denoted Y1,measured resin density of the used resist is denoted Y2, the amount ofthe used resist is denoted L (g), and the amount of solvent that shouldbe added is denoted I (g).

Step 5

The control portion 120 outputs the signal to operate the control valve106. The control valve operates to add the thinner in the viscositycontrol tank 101. The amount of thinner added at this time, is 90% ofthe calculated amount. The agitator 107 agitates the resist in theviscosity control tank 101

Step 6

The ultrasonic viscometer 119 measures the viscosity and the temperatureof the resist, and the control portion 120 calculates the amount ofthinner that should be added to the used resist again.

Step 7

Operations of STEP 5 and STEP 6 are repeated, until the measured resindensity become within the predetermined range. When the measured resindensity becomes within the predetermined range, controlling of theviscosity ends.

Step 8

After the control of the viscosity of the resist, the resist is suppliedas a recycled resist through the filter 116.

This resist recycle apparatus has two kinds of nozzles illustrated inFIG. 1 as 121, that add the solvent thinner. One nozzle is a nozzle fora large amount, and another nozzle is a nozzle for a small amount. Theamount of thinner determines which nozzle to use.

When a used resist is collected as waste liquid, a solvent is generallyevaporated with passage of time.

For example, the resist is used on condition that the resin density is25%. When this resist is collected after use, the resin density becomeslarger than 25%. Solvents are added until the resin density becomes apredetermined value in this invention.

The addition of the calculated amount of solvent is divided into severaltimes in this invention. The amount of added solvent gets smaller andsmaller with every addition, and the resin density is measured afterevery addition. This makes the control of resin density more precise.

The method for resist recycling of this invention makes the control ofresin density of resist more precise, so waste resist liquid is recycledas a resist in good condition.

A percentage is used in the description of the embodiment, but a ratiois used in coefficients of expressions and figures, and their meaning isthe same. For example, if the resin density in a figure indicates 0.24,it means 24%.

It is very easy to change a percentage to a ratio. It is also easy tochange a ratio to percentage. Both ways are applied in this invention.

What is claimed is:
 1. A resist recycling apparatus comprising: aviscosity control tank supplied with a waste resist liquid, a solventtank that supplies a solvent to said viscosity control tank, aviscometer that measures viscosity of the waste resist liquid in saidviscosity control tank, a control portion that calculates a resindensity of the waste resist liquid responsive to the viscosity measuredby said viscometer and a temperature of the waste resist liquid, andthat responsive to a difference between the calculated resin density anda predetermined resin density determines an amount of solvent to besupplied to said viscosity control tank to change the waste resistliquid to recycled resist liquid, and a filter for removing dust fromthe recycled resist liquid.
 2. A resist recycling apparatus as claimedin claim 1, wherein said viscometer is an ultrasonic viscometer.
 3. Aresist recycling apparatus as claimed in claim 2, wherein said controlportion calculates the resin density of the waste resist liquidresponsive to an electric current value measured by said ultrasonicviscometer and the temperature of the waste resist liquid.
 4. A resistrecycling apparatus as claimed in claim 3, wherein said control portioncalculates the resin density based on a following expression:Y=(CT+D)LnX+ET+F, wherein Ln is a natural logarithm, C, D, E and F arecoefficients determined by compositions of the waste resist liquid andthe solvent, T is the temperature of the waste resist liquid, X is theelectric current value, and Y is the resin density.
 5. A resistrecycling apparatus as claimed in claim 1, further comprising: aplurality of nozzles supplying the solvent to said viscosity controltank, wherein diameters of said plurality of nozzles differ from eachother.
 6. A resist recycling apparatus comprising: a viscosity controltank supplied with a waste resist; a viscometer that measures aviscosity of the waste resist in said viscosity control tank so as toobtain an electric current value; a controller that determines arelationship between the electric current value and resin density of thewaste resist, that calculates a resin density of the waste resist basedon the relationship, the electric current value and a temperature of thewaste resist in said viscosity control tank, and that determines anamount of solvent to add to the waste resist based on a differencebetween the calculated resin density and a predetermined resin density;a solvent supplier that supplies the determined amount of solvent tosaid viscosity control tank to adjust the resin density of the wasteresist; and a filter that removes dust from the waste resist havingadjusted resin density, to obtain a recycled resist.
 7. The resistrecycling apparatus as claimed in claim 6, wherein said viscometer is anultrasonic viscometer.
 8. The resist recycling apparatus as claimed inclaim 6, wherein said controller calculates a resin density based on afollowing expression: Y=(CT+D)LnX+ET+F, wherein Ln is a naturallogarithm, C, D, E and F are coefficients determined by compositions ofthe waste resist and the solvent, T is the temperature of the wasteresist, X is the electric current value and Y is the resin density. 9.The resist recycling apparatus as claimed in claim 6, wherein saidsolvent supplier comprises a plurality of nozzles that supply thedetermined amount of solvent.
 10. The resist recycling apparatus asclaimed in claim 6, wherein the relationship between the electriccurrent value and resin density is Y=ALnX+B wherein Ln is a naturallogarithm, A and B are coefficients determined by compositions of thewaste resist and the solvent, X is the electric current value, and Y isthe resin density.
 11. The resist coating apparatus according to claim10, wherein the coefficients A and B are based on expressions asfollows: A=CT+D, and B=ET+F, wherein C, D, E and F are coefficientsdetermined by compositions of the waste resist and the solvent, and T isthe temperature of the waste resist.
 12. The resist recycling apparatusas claimed in claim 6, further comprising a gas supplier that suppliesgaseous nitrogen to said viscosity control tank.
 13. A resist coatingapparatus comprising: a viscosity control tank supplied with a wasteresist; a viscometer that measures a viscosity of the waste resist insaid viscosity control tank so as to obtain an electric current value; acontroller that determines a relationship between the electric currentvalue and resin density of the waste resist, that calculates a resindensity based on the relationship, the electric current value and atemperature of the waste resist in said viscosity control tank, and thatdetermines an amount of solvent to add to the waste resist based on adifference between the calculated resin density and a predeterminedresin density; a solvent supplier that supplies the determined amount ofsolvent to said viscosity control tank to adjust the resin density ofthe waste resist; a filter that removes dust from the waste resisthaving the adjusted resin density, to obtain refreshed waste resist; anda resist supplier that supplies the refreshed waste resist for resistcoating.
 14. The resist coating apparatus according to claim 13, whereinsaid viscometer is an ultrasonic viscometer.
 15. The resist coatingapparatus according to claim 13, wherein the relationship between theelectric current value and resin density is Y=ALnX+B, wherein Ln is anatural logarithm, A and B are coefficients determined by compositionsof the waste resist and the solvent, X is the electric current value,and Y is the resin density.
 16. The resist recycling apparatus asclaimed in claim 10, wherein the coefficients A and B are based onexpressions as follows: A=CT+D, and B=ET+F, wherein C, D, E and F arecoefficients determined by compositions of the waste resist and thesolvent, and T is the temperature of the waste resist.
 17. The resistcoating apparatus according to claim 13, wherein said controllercalculates a resin density based on a following expression:Y=(CT+D)LnX+ET+F, wherein Ln is a natural logarithm, C, D, E and F arecoefficients determined by compositions of the waste resist and thesolvent, T is the temperature of the waste resist, X is the electriccurrent value, and Y is the resin density.
 18. The resist coatingapparatus according to claim 13 comprising a gas supplier that suppliesgaseous nitrogen to said viscosity control tank.
 19. A resist coatingapparatus comprising: a structure that collects edge rinse resist liquidor back rinse resist liquid from a resist coating process as wastedresist; a tank that stores the wasted resist; a viscometer that measuresa viscosity of the wasted resist in the tank so as to obtain an electriccurrent value; a controller that determines a relationship between theelectric current value and resin density of the wasted resist, thatcalculates a resin density of the wasted resist based on therelationship, the electric current value and a temperature of the wastedresist in the tank, and that determines an amount of solvent to add tothe wasted resist based on a difference between the calculated resindensity and a predetermined resin density; a solvent supplier thatsupplies the determined amount of solvent to said tank to adjust theresin density of the wasted resist; a filter that removes dust from thewasted resist having the adjusted resin density to obtain a refreshedresist; and a resist supplier that supplies the refreshed resist for theresist coating process.
 20. The resist coating apparatus according toclaim 19, wherein said viscometer is an ultrasonic viscometer.
 21. Theresist coating apparatus according to claim 19, the relationship betweenthe electric current value and resin density is Y=ALnX+B, wherein Ln isa natural logarithm, A and B are coefficients determined by compositionsof the wasted resist and the solvent, X is the electric current value,and Y is the resin density.
 22. The resist coating apparatus accordingto claim 21, wherein the coefficients A and B are based on expressionsas follows: A=CT+D, and B=ET+F, wherein C, D, E and F are coefficientsdetermined by compositions of the wasted resist and the solvent, and Tis the temperature of the wasted resist.
 23. The resist coatingapparatus according to claim 19, wherein said controller calculates aresin density based on an expression as follows: Y=(CT+D)LnX+ET+F,wherein Ln is a natural logarithm, C, D, E and F are coefficientsdetermined by compositions of the wasted resist and the solvent, T isthe temperature of the wasted resist, X is the electric current value,and Y is the resin density.
 24. The resist coating apparatus accordingto further 19, comprising a gas supplier that supplies gaseous nitrogento said tank.